Florie OGOR Thesis defense

Submicron 3D structures are required in many fields (photonics, optics, biology, etc.). Fabricating such structures is difficult. Multiphoton polymerization is a suitable technique, but current fabrication times are long (one day to fabricate a mm3 structure), making industrial production costly and limiting the development of these structures. We present our contribution to the development and optimization of a massively parallelised multiphoton polymerization fabrication process for these structures. Two parallelization techniques are investigated at IMT Atlantique: one using a diffractive optical element and another, studied in this thesis, using a spatial light modulator in an imaging configuration and an ultra-sensitive TTA resist (Triplet-Triplet Annihilation), enabling writing with 1920 × 1080 beams in parallel. The use of multiple write beams can lead to resolution limiting proximity effects. We present our numerical simulation model of the photochemical process to understand, predict and correct these effects. We present possible improvements based on these simulations and the improved understanding of the optical system. The fabrication method we have developed enables us to fabricate structures with a resolution of around one micrometer in X,Y and several tens of micrometers in height on surfaces of the order of cm2 in just a few minutes. Finally, examples of applications in biology and ophthalmology, adapted to the photoplotter performance are presented.